JPH01173502U - - Google Patents
Info
- Publication number
- JPH01173502U JPH01173502U JP7085488U JP7085488U JPH01173502U JP H01173502 U JPH01173502 U JP H01173502U JP 7085488 U JP7085488 U JP 7085488U JP 7085488 U JP7085488 U JP 7085488U JP H01173502 U JPH01173502 U JP H01173502U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- diameter step
- case
- small
- step portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Actuator (AREA)
- Diaphragms And Bellows (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7085488U JPH01173502U (en]) | 1988-05-27 | 1988-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7085488U JPH01173502U (en]) | 1988-05-27 | 1988-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173502U true JPH01173502U (en]) | 1989-12-08 |
Family
ID=31296075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7085488U Pending JPH01173502U (en]) | 1988-05-27 | 1988-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173502U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6139522A (ja) * | 1984-05-17 | 1986-02-25 | バリアン・アソシエイツ・インコ−ポレイテツド | 平坦なタ−ゲツト及び凹状のタ−ゲツトを有するマグネトロンスパツタリング装置 |
| JPS6139841U (ja) * | 1984-08-20 | 1986-03-13 | 三洋電機株式会社 | スイツチ装置 |
-
1988
- 1988-05-27 JP JP7085488U patent/JPH01173502U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6139522A (ja) * | 1984-05-17 | 1986-02-25 | バリアン・アソシエイツ・インコ−ポレイテツド | 平坦なタ−ゲツト及び凹状のタ−ゲツトを有するマグネトロンスパツタリング装置 |
| JPS6139841U (ja) * | 1984-08-20 | 1986-03-13 | 三洋電機株式会社 | スイツチ装置 |